Specialized manufacturer of Digital Pressure Meters and Load Cells



Clean type Pressure Transmitter for Semiconducting Industry
VSHS/VSHT series

  • Electropolishing finish and precision cleaning.
  • Supports VCR/UJR fittings of 1/4, 3/8 and 1/2 internal/external threads.
  • Corrosion-resistant construction with SUS316L (VIM+VAR) wetted surfaces.
Measured medium Gases, liquids or other media that will not corrode SUS316L.
Pressure Type Positive and compound pressures can be measured.
Measured Range Can be specified within the range of 0.3 to 20 MPa of rated capacity. In addition, calibration of compound pressure within the range 0.1 to 1MPa is possible.
Output type Specify among 4 to 20mA (2 wire system), 4 to 20 mA (2-wire, 4-wire), 1 to 5 V, 0 to 5 V, and 0 to 10 V.


Accuracy ±0.4%R.C. (0.3MPa:±0.6%R.C.)
Compensated Temperature Range
(Temperature of medium to be measured)
0–60°C (No condensation or freezing)
Safe Temperature Range
(Temperature of medium to be measured)
0–80°C (No condensation or freezing)
Temperature Effect ±0.5%R.C./10°C
Safe Overload Rating 200%R.C.(20MPa:150%R.C.)
Leakage 1×10-10Pa·m³/sec. or less
Pressure Port Material SUS316L (VIM+VAR)
VIM:Vacuum Induction Melting
VAR:Vacuum Arc Remelting
Sealing Special electron beam welding
Finish(Sensor Part) Electropolishing (Ra0.3µm or less) and Precision cleaning
Screw type VCRsupported [1/4, 3/8 and 1/2] male and female screw
UJR supported [1/4, 3/8 and 1/2] male and female screw
Cable PVC coated 4-core (current type is 2-core) shielded
Pigtail or Connector connection
Weight Approx. 280g (Cable 3m included)
Accessories Operating manual 1 copy (Specify English or Japanese.)
Test report 1 copy

Model Selection


Selection Check Model Specifications
1.Model   VSHS Single feed port
  VSHT Double feed port
2.Screw Size   00 Integral male screw equivalent to 1/4VCR
  01 1/4VCR supported male screw
  02 3/8VCR supported male screw
  03 1/2VCR supported male screw
  11 1/4VCR supported female screw
  12 3/8VCR supported female screw
  13 1/2VCR supported female screw
  21 1/4UJR supported male screw
  22 3/8UJR supported male screw
  23 1/2UJR supported male screw
  31 1/4UJR supported female screw
  32 3/8UJR supported female screw
  33 1/2UJR supported female screw
3.Analog output - - Output type Response frequency Safe load resistance Consumption current
  A2 1–5V (3-wire system) 50Hz 100kΩ or more Approx. 10mA
  A4 0–5V (3-wire system)
  A5 0–10V (3-wire system)
  A6 4 to 20mA (2 wire system) 500Ω or less -
4.Calibration - - Rated capacity Example of calibration range
  See right table. Enter the range in the
  as it is.
0.3MPa 0.3MPa
Specify at least 60% of the rated capacity.
*Rated capacity 10MPa is only 100%
  1MPa 1MPa
  3.5MPa 3.5MPa
  10MPa 10MPa
  20MPa 20MPa
5.Cable Connection   S Pigtail
  N Connector connection
6.Length (Cable)   01 1m
  02 2m
  03 3m Standard
  □□ 4–99m *Specify required length in meters.  m
7.Rated Capacity (R.C.)   003 0.3MPa
  010 1MPa
  035 3.5MPa
  100 10MPa
  200 20MPa
8.Power   4 DC24V (Current output only)
  6 DC15–24V (Voltage output only)
9.Data   N Test report (3-point measurement)/(Standard)
  T Traceability documents
(Breakdown of traceability documents 1: Traceability certificate
2: Traceability system diagram
3: Test report (3-point measurement))
  K Strength calculation sheet
  M Mill seet
  L Strength calculation sheet + Mill seet
  W Traceability documents + Strength calculation sheet
  Y Traceability documents + Mill seet
  S Traceability documents + Strength calculation sheet + Mill seet

External dimensions for VSHS (Unit: mm)

*Refer to line connection here

External dimensions External dimensions External dimensions External dimensions

External dimensions for VSHT (Unit: mm)

*Refer to line connection here

External dimensions External dimensions External dimensions External dimensions

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