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Pressure TransmitterStructural Schematics for Pressure Sensors

Structural schematics for Semi-conducting pressure sensors

Structure of the sensor chip

Structure of the sensor chip
In silicon chip pressure port(silicon diaphragm), silicon gauge is formed by impurity diffusion like the normal IC manufacturing process.
Applying pressure to silicon results in the bend. Depending on this, gauge resistance changes, is converted into electrical signal. (Piezoresistive effect)
This gauge includes a feature of high gauge factor compared to the metal. (metal gauge: 2-3, silicon gauge: 10-100)
Therefore, this makes it possible to gain higher output resulting in produce using thick diaphragm, improves pressure-resistant performance.

Target model
Semiconductor pressure sensor
VDP4, VSR3(G3), VSW2(Low-tension), VPMR, VPMG, etc..


Structural schematics for Semi-conducting pressure sensors
Semi-conductor pressure sensors use piezoresistive silicon gauge.
These detect a pressure through silicon oil, and flush diaphragm (double diaphragm method).

The materials of the part to come in contact with the liquid are Hastelloy C-22, SUS316L, etc.. Thus these sensors have high anti-corrosion.
[If these sensors have G3/8(pipe threads), these use the O-ring seal by FKM(fluoro rubber).]

Features
●It is possible to produce each type of sensor element used to measure positive and negative pressure, compound pressure and absolute pressure.
●Corrosion-resistant performance is excellent because it is possible to use Hastelloy C22, SUS316L as a pressure port material contacting directly to the medium.
●Excellent corrosion-resistant performance is based on the thick diaphragm of silicon chip to detect the pressure.

Target model
Semiconductor diaphragm pressure sensor
VESW, VESX, VESY, VESZ, VHR3, VHG3, VPRHP, VNF, HS1, HV1, VESI, VESV, VSW2, etc..

Structural schematics for Strain gauge pressure sensors/Thin-film type pressure sensors


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